ASINGLE-CRYSTALSILICONSYMMETRICALANDDECOUPLEDGYROSCOPEONINSULATINGSUBSTRATE；ALMINIUMNITRIDEBASEDTHINFILMBULKACOUSTICRESONATORUSINGGERMANIUMSACRIFICIALLAYERETCHING；AlterationofPoisson'sratioinhighcouplingpiezoelectrics；Capacitancecouplingmicromechanicalfilter；Coupled,macro-micromodelingforhotdeformationandsintering……
机械工程通用零部件：英文版
2005年1期
