简介：Zinctinoxide(ZTO)thinfilms,withzincacetateandtributyltinchlorideasrawmaterials,weredepositedonglasssubstratesbythemethodofmetalorganicchemicalvapordeposition(MOCVD).Thecrystallization,microstructureandopticalpropertieswereinvestigatedbyscanningelectronicmicroscope(SEM),X-raydiffraction(XRD)andultraviolet-visible(UV-Vis)spectrophotometer.TheresultsshowthatwiththeincreaseinSn/Znratio,thecrystalchangesfromwurtzitetorutilephase.Whentheratioreaches11:18,theintensityofZn_2SnO_4peaksappearstobethestrongestandtheopticalbandgapisabout3.27eV.Calculatedbytheenvelopemethod,thethicknessoftheZTOthinfilmsis713.24nm.MeasuredbyUV-Visspectrophotometer,thetransmittanceoftheZTOthinfilmsreachesupto80%inthewavelengthrangeof400-1000nmwhentheSn/Znratiois7:18.