简介:Anovelhorizontalpush-pullmulti-substrateepitaxyboatwiththreeseparatecellsisintroducedinthisarticle,withmulti-substrateLPEprocessingisfeasibleinhorizontalLPEfurnace.TheprocessesofLPEAlxGa1-xAs/GaAssolarcellsarestudiedandtheefficiencyofthesolarcellsachieved19.8%(AM0,25℃,120mW/cm^2).