Inordertosolvetheproblemofhighprecision,completeelectricinsulatingdetectionofthepressuremeasuringsystem,wehavedevelopedthethree-beaminterferometer.Inthispaper,theoperationprinciple,structureofthesystemandmeasuringresultsaregiven.
半导体光子学与技术：英文版
1997年1期
