Effect of Argon Addition on Morphology and Structure of Diamond Films （from Microcrystalline to Nanocrystalline）-中国期刊网

摘要 Micro-/nanocrystallinediamondfilmsdepositedinAr/H2/CE4microwaveplasmashavebeenstudied,withargonflowratesintherangeof70-100seem.Theeffectsofargonadditiononmorphology,surfaceroughness,qualityandstructurewereinvestigatedbyscanningelectronmicroscopy,surfaceprofiler,RamanspectrometerandX-raydiffraction（XRD）.Itisdemonstratedthatwhentheargonflowrateis70sccmor75sccm,well-facetedpolycrystallinediamondfilmscanbegrownatalowsubstratetemperaturelessthan610℃.Withtheincreaseintheargonflowrate,thesmoothcrystallographicplanesdisappeargradually.Instead,roughcrystallographicplanesmadeupofsmallaggregatesbegintotakeshape,resultingfromtheincreaseinthesecondarynucleationrate.Nanocrystallinediamondfilmswereobtainedataflowrateof100sccm,andalloftheprepareddiamondfilmsweresmooth,withasurfaceroughness（Ra）lessthan20nm.Ramananalysesrevealthattheamountofamorphouscarbonincreasessignificantlywiththeincreaseinargonflow.TheresultsofXRDshowthatcrystallinesizeandpreferentialorientationofdiamondfilmsdependontheargoncontentintheplasmas.

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Effect of Argon Addition on Morphology and Structure of Diamond Films （from Microcrystalline to Nanocrystalline）

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Effect of Argon Addition on Morphology and Structure of Diamond Films （from Microcrystalline to Nanocrystalline）

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