简介:Thepropertyofsiliconmicro-capacitiveaccelerometerisanalyzedanddiscussedbyestablishingthemodelofthesensor,tolayabasisforoptimizationdesignofsensorsystemstructure.Discussedissuesincludethestaticmodelinganddynamicbehaviorofthetwocommnlyusedstructures,i.e.,double-cantileversupportedandfour-beamsupportedstructures,andalsothemeasurementrangeofthesedevices.