简介:提出了一种亚微米深度的纯位相型玻璃衍射光栅制作工艺,采用光刻制栅方法对要制作的光栅结构进行了分析;用AUTOCAD绘图软件绘制光栅的排列布局以及MATLAB软件对设计出的图案进行衍射图样模拟,在基于数字微镜的光刻机上进行曝光,由涂覆光刻胶的铬玻璃上得到缩微图案;观察了单色激光的夫琅禾费光栅衍射图样,以确定最终的设计图案;用电子束刻蚀方法得到的铬掩膜板进行常规光刻工艺处理,得到纯位相型的衍射光栅,最后通过对衍射光栅的衍射图案的失效性分析确定最佳的光刻工艺。结果表明:利用光刻制栅方法不仅可以在玻璃上制得纯位相型光栅,同样也可以在硅片、金属等其他基底上制得光栅或其他光学重复单元,方法可行,且材料成本不高。
简介:[篇名]SignificantincreaseinmachinepartdurabilityandlongevityduetothenewpatentedLincarb,LinterprocessandLinheattechnologies,[篇名]Lasersurfacetreatmentofsteels,[篇名]ForecastingofthePhaseTransformationHardenedZoneandGorrelationInfluenceFactorsintheSurfaceHeatTreatmentbyPlasma,[篇名]Fatigueandfracturebehaviorofalasersurfaceheattreatedmartensitichigh-nitrogentoolsteel,[篇名]Theoreticalmodelsofsurfaceheattreatmentofproductsinsolarfurnaces-1:uniformradiant-energyflux。
简介:CorrelationbetweentheflnorescentmaterialsproducedbyendosymbioticpseudomonasfluorcscensFPT-9601andmicrobialcontrolofsoil-bornebacterialdiseaseusingthisstrain;CORROSIONOFALUMINUMALLOY2024BYJETFUELDEGRADINGMICROORGANISMS;Developmentandtestingofnewvolatilecorrosioninhibitorsfornultimetalsystems;Developmentofdiscbrakerotorsforheavy-andmedium-dutytrackswithhighthermalfatiguestrength;DimethylSulfideRemovalfromSyntheticWasteGasUsingaFlatPoly(dimethylsiloxane)-CoatedCompositeMembraneBioreactor。
简介:AStudyofMicrobiologicallyInducedCorrosionbySRBonCarbonSteelusingHydrogenPermeation,Alloying,DeoxidizingandInoculatingCastAlloyswithPressedPowderPseudo-MasterAlloys,Anaerobicdigestionforreductionandstabilizationoforganicsolidwasteduringspacemissions:Systemsanalysis,Anaerobicdigestionforreductionandstabilizationoforganicsolidwastesduringspacemissions:Laboratorystudies,AssessmentofmicrobialcommunityvariabilityinreplicatetubularnitrifyingbioreactorsusingPCRandTRFLPanalysis.
简介:Dampingahybridsteppingmotorwithestimatedpositionandvelocity,Gridcurrentregulationofathree-phasevoltagesourceinverterwithanLCLinputfilter,TorsionalinteractionstudiesonpowersystemcompensatedbySSSCandfixedcapacitor,Amultivariablenewcontrolsolutionforincreasedlonglinesvoltagerestorationstabilityduringblackstartup,
简介:[篇名]Magneto-OpticalStudiesoftheCriticalStatesinc-axisOrientedMgB{sub}2ThinFilmandBulkMgB{sub}2/MgNano-Composites,[篇名]TheSoreteffectonconvectioninahorizontalporousdomainundercrosstemperatureandconcentrationgradients,[篇名]Improvingtheanti-seizureabilityofSiCsealinwaterwithRIEtexturing,[篇名]Coppernanoparticleswithinamorphousandcrystallinedielectricmatrices,[篇名]In-linelaserDopplervelocimeterusingfibre-opticBragggratinginterferometricfilters,[篇名]PreparationofaUV-attenuatingagentusingamechanochemicalreaction,[篇名]DesignofanAdaptiveObserverforSensorlessVectorControlofInductionMachinesunderRegeneratingConditions,[篇名]ConflictovernaturalresourcesamongpastoralistsinnorthernKenya:alookatrecentinitiativesinconflictresolution,[篇名]Releasingnitrogenfromammoniatedligninbywhiterotfunguscometabolizesenvironmentalpollutants,[篇名]Onanalogyanddissimilarityofdependenceofstabilityonseveralparametersinflowsimulations,[篇名]Ontheexponentialstabilityofaclassofnonlinearsystemsincludingdelayedperturbations,[篇名]6-indiameterInPsinglecrystalsgrownbythehot-wall,[篇名]Swing-upControlofaTranslationalInvertedPendulumHavingRestrictedTravel,[篇名]RobustPIDRate-BasedControlforPropagationDelayVariation,[篇名]Apracticalapproachforthedesignofmultivariablecontrolsystems,[篇名]Fibersensordetectslithium。
简介:[篇名]Doublethermochemicaltreatmentintoolmanufacturingfromstructuralsteel,[篇名]Lifetimepredictionofhelicoptergears:experimentalinvestigationsandcomputermodelling,[篇名]Fluidizedbedapparatusesforthermaltreatmentandclassificationofdispersematerials,[篇名]Experimentalrigofthermochemicaltreatmentscraptires,[篇名]Thermochemicaltreatmentofsteel20khuponcyclictemperaturechanges。
简介:[篇名]Relationsbetweenfracturetoughness,hardnessandmicrostructureofvacuumheat-treatedhigh-speedsteel,[篇名]Flexiblefurnaceconceptsforvacuumheattreatmentusinghigh-pressuregasquenching,[篇名]Effectofboronmicro-alloyingonmicrostructureandmechanicalpropertiesoffine-grainedCM247LCsuperalloy,[篇名]PROPERTIESOFPOLYCRYSTALSSINTEREDATHIGHPRESSURESFROMDIAMONDNANOPOWDERSPRODUCEDBYDETONATIONANDSTATICSYNTHESES,[篇名]TheEffectsofSteelQuality,VacuumHeatTreatmentQuenchRateandCharpyV-NotchImpactTestTemperatureontheImpactToughnessandMicrostructureofPremiumQualityH-13ToolSteel。