简介：Moleculardynamics(MD)simulationswereperformedtoinvestigateF+continuouslybombardingSiCsurfaceswithenergiesof100eVatdifferentincidentanglesat300K.Thesimulatedresultsshowthatthesteady-stateuptakeofFatomsincreaseswithincreasingincidentangle.Withthesteady-stateetchingestablished,aSi-C-Freactivelayerisformed.ItisfoundthattheetchingyieldofSiisgreaterthanthatofC.IntheF-containingreactionlayer,theSiFspeciesisdominantwithincidentangleslessthan30o.Forallincidentangles,theCFspeciesisdominantoverCF2andCF3.

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简介：利用电子衍射，X射线衍射和荧光光谱等方法研究了LnBaB0O16(Ln=La,Y)的结构特性，LnBaB9O16为单斜晶系，其中LaBaB9O16的晶胞参数a=1.3660nm,b=0.7882nm,c=1.6253nm,β=106.15°,YBaB9O16的晶胞参数a=1.3476nm,b=0.776nm,c=1.6040nm,β=106.38°，荧光光谱研究表明，这两种化合物结构不同，Y^3+在YBaB9O16结构中处于中心对称格位，而LaBaB9O16中La^3+的格位则无中心对称性，Gd^3+部分取代LaBaB9O16:Eu^3+中的La^3+可改善Eu^3+离子的发光性质，LaBaB9O16:Eu^3+在真空紫外区的吸收比较弱，这可能与硼氧比较小有关。

简介：本文利用同步辐射角分辨光电子谱研究了f.c.c.Fe与Cu{111}之间的界面。观察到了位于表面布里渊区中K点附近的界面态，表明它是一个有序的界面。垂直出射的价带谱表明外来Fe原子对衬底Cu{111}的能带结构无任何影响。这与互混的Co/Cu{111}的结果不同，表明界面处不存在Fe与Cu原子之间的互混。

简介：ThisworkinvestigatedC2F6/O2/ArplasmachemistryanditseffectontheetchingcharacteristicsofSiCOHlow-kdielectricsin60MHz/2MHzdual-frequencycapacitivelycoupleddischarge.FortheC2F6/Arplasma,theincreaseinthelow-frequency(LF)powerledtoanincreasedionimpact,promptingthedissociationofC2F6withhigherreactionenergy.Asaresult,fluorocarbonradicalswithahighF/Cratiodecreased.Theincreaseinthedischargepressureledtoadecreaseintheelectrontemperature,resultinginthedecreaseofC2F6dissociation.FortheC2F6/O2/Arplasma,theincreaseintheLFpowerpromptedthereactionbetweenO2andC2F6,resultingintheeliminationofCF3andCF2radicals,andtheproductionofanF-richplasmaenvironment.TheF-richplasmaimprovedtheetchingcharacteristicsofSiCOHlow-kfilms,leadingtoahighetchingrateandasmoothetchedsurface.