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  • 简介:WeinvestigatereactivefluorineatomspectroscopiccharacterizationinatmosphericpressureofHe/SF6plasmausingatomicemissionspectrometry.Asinputradiofrequency(RF)powerlevelsareraisedfrom140to220W,theemissionspectraof685.60(3p4D→3s4Ptransition)and739.87nm(3p4P→3s4Ptransition)increasesignificantly.Moreover,anoptimalvalueofSF6volumeconcentrationintheproductionoffluorineradicals,whichis0.8%isachieved.AdditionofcertainamountsofO2intoHe/SF6plasmaresultsinthepromotionofSF6dissociation.EmissionintensitiesoffluorineatomsshowthemaximumattheO2/SF6ratioof0.4.

  • 标签: 光谱表征 等离子体 氟原子 原子发射光谱法 大气压力 体积浓度
  • 简介:Wereportthefabricationofsubmicrometerpitsarray(SP-array)on6H-SiCsurfacebytheinterferenceoftwofemtosecondlaserbeams.FormationmechanismsandopticalabsorptionofSP-arrayarestudied.Therelativereflectivityandtransmissivityofwhitelightdecreaseto10%ofthevaluesofSiCcrystal,andtheopticalabsorptionisenhancedto97%.Therelativereflectivityandtransmissivityofincidentangleswithintherangeof20°-60°arekeptbelow25%.TheenhancementmechanismofopticalabsorptionoftheSP-arrayisalsodiscussed.

  • 标签: 亚微米级 光吸收 SiC 阵列 激光干涉 飞秒