Comparison of GexSi1—x Grown by UHV／CVD from Si2H6／GeH4 and SiH4／GeH4-中国期刊网

摘要 UsingdoublecrystalX-raysdiffraction(DCXRD)andatomicforcemicroscopy(AFM),theresultsofGexSi1-xgrownUHV/CVDfromSi2H6andSiH4areanalyzedandcompared.Adsorbatescanmigratetotheenergy-favoringpositionduetotheslowgrowthratefromSiH4.Inthiscase,aSibufferthatisolatestheeffectofsubstrateonepilayercouldnotbegrown,whichresultsinapitpenetratingintoepilayerandbuffer.TheFWHMis0.055°inDCXRDfromSiH4.Thepresenceofdiffractionfringesisanindicationofanexcellentcrystallinequality,TheroughnessofthesurfaceisimprovedifgrownbySi2H6:however,thecrystalqualityoftheGex2Si1-xmaterialbecameworsethanthatfromSiH4duetomuchlargergrowthratefromSi2H6.ThecontentofGeisobtainedfromDCXRD,whichindicatesthegrowthratefromSi2H6islargest,thenGeH4andthatfromSiH4isleast.

1CHENGBu－wen;LIDai－zong;等. Growth of SiGe Films by Cold—wall UHV／CVD Using GeH4 and Si2H6.物理电子学,2000-03.
2. Preparation of Ultrafine Si Powders from SiH4 by Laser-induced Gas Phase Reaction.材料科学与工程,1995-01.
3Hua CHENG;Aimin WU;Nanlin SHI;Lishi WEN. Effect of Ar on Polycrystalline Si Films Deposited by ECR-PECVD using SiH4.材料科学与工程,2008-05.
4. “6＋2”大于“4＋4”.教育学,2010-08.
5. GEHFT.德语,1999-01.
6王一军;从顺宝. 2-氨基-6甲基-4-丙基-4H-[1，2，4]三氮唑-[1，5-a]嘧啶-5-酮的合成.制药化工,2007-04.
7LI, Hong-Xi;ZHANG, Yong;REN, Zhi-Gang;CHENG, Mei-Ling;WANG, Jing;LANG, Jian-Ping. Synthesis of Novel Binuclear Samarium Thiolate Complexes [（THF）3I2Sm（μ-SAr）]2 （Ar=Ph, 4-Me2NC6H4） and Crystal Structure of [（THF）3I2Sm（μ-S-4-Me2NC6H4）]2.化学,2005-11.
8. Synergetic effects of NaA1H4-TiF3 co-additive on dehydriding reaction of Mg（A1H4）2.物理,2014-06.
9周静. 1、2、3、4——.教育学,2010-09.
10Chenhui Hu;Lihong Zhang;Liyuan Cheng;Jing Chen;Wenhua Hou;Weiping Ding. A comparison of H＋-restacked nanosheets and nanoscrolls derived from K4Nb6O17 for visible-light degradation of dyes.物理,2014-02.

Comparison of GexSi1—x Grown by UHV／CVD from Si2H6／GeH4 and SiH4／GeH4

来源期刊

相关推荐

同分类资源更多

相关关键词

Comparison of GexSi1—x Grown by UHV／CVD from Si2H6／GeH4 and SiH4／GeH4

来源期刊

相关推荐

同分类资源 更多

相关关键词

同分类资源更多