摘要
ThethermodynamicphasestabilityareadiagramsofBCl3-NH3-SiCl4-H2-ArsystemwereplottedviaFactsagesoftwaretopredictthekineticexperimentalresults.Theeffectsofparameters（ie,partialpressureofreactants,depositiontemperatureandtotalpressure）onthedistributionregionsofsolidphaseproductswereanalyzedbasedonthediagrams.Theresultsshowthat：（a）Solidphaseproductsaremainlyaffectedbydepositiontemperature.TheareaofBN＋Si3N4phaseincreaseswiththetemperaturerisingfrom650to900℃,anddecreaseswiththetemperaturerisingfrom900to1200℃;（b）Whentemperatureandtotalpressureareconstants,BN＋Si3N4phaseexistsatahighpartialpressureofNH3;（c）Theeffectoftotalsystempressureiscorrelatedtodepositiontemperature.Thetemperaturerangingfrom700to900℃underlowtotalpressureistheoptimumconditionforthedeposition.（d）Appropriatekineticparameterscanbedeterminedbasedontheresultsofthermodynamiccalculation.Si–B–Ncoatingisobtainedvialowpressurechemicalvapordeposition.TheanalysisbyX-rayphotoelectronspectroscopyindicatesthatB–NandSi–Narethemainchemicalbondsofthecoating.
出版日期
2015年05月15日（中国期刊网平台首次上网日期，不代表论文的发表时间）
